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Applications of the CATGIXRF computer program to the grazing incidence X-ray fluorescence and X-ray reflectivity characterization of thin films and surfaces
X-Ray Spectrometry, 09/25/09
Tiwari MK et al. – A computer program CATGIXRF, has been developed for GIXRF characterization of thin film and surfaces. Methodology of the program and its various features has been discussed in detail. The program offers analysis of GIXRF and XRR data simultaneously. The utility of the program has been demonstrated by example calculations and by providing a few examples of XRR and GIXRF characterization of a variety of thin–layered materials.
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