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Quantitative elemental analysis of individual particles with the use of micro-beam X-ray fluorescence method and Monte Carlo simulation
X-Ray Spectrometry, 08/13/09

Czyzycki M et al. – It was found that the root mean square of concentration uncertainty, for the all elements present in the particle, increases with growing sample size. More accurate results were obtained for high Z elements such as Fe–Pb, as compared to others. The elemental percentage uncertainty did not exceed 14% for any particular sample and 6% for the whole group of the measured micro–spheres as an average.

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